GASES

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1, 3 Hexalfluorobutadiene - C₄F₆

Description

Liquefied gas, Toxic, Flammable, N.O.S

Applications

HFB is used for critical dimension dielectric etch applications. Higher SiO2 etch rates can be achieved with better selectivity. HFB is a colorless, odorless, and flammable liquefied gas.

Constituent concentration		Specification	Actual	LDL's
1, 3 Hexafluorobutadiene	C₄F₆	99.99%	≥ 99.99%	LDL's
Nitrogen	N₂	< 40 ppmv	29.2 ppmv	< 0.5 ppmv
Oxygen, Argon	O₂, Ar	< 10 ppmv	7.3 ppmv	< 0.5 ppmv
Moisture	H₂O	< 20 ppmv	3.4 ppmv	< 0.2 ppmv
Carbon Dioxide	CO₂	< 20 ppmv	< 1.1 ppmv	< 0.5 ppmv
Other Fluorocarbons		< 200 ppmv	8.5 ppmv	< 1 ppmv
Other Hydrocarbons		< 250 ppmv	< 1 ppmv	< 1 ppmv
Hydrogen Fluoride	HF	< 10 ppmv	< 5 ppmv	< 5 ppmv
Isopropyl Alcohol	C₂H₈O	< 20 ppmv	< 1 ppmv	< 1 ppmv

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